PENGARUH DOPING SbCl3 TERHADAP STRUKTUR DAN SIFAT OPTIK FILM TIPIS ZnO DENGAN METODE SOL-GEL SPIN COATING

This research was conducted to produce raw materials for the manufacture of ZnO thin films doped with Antimony (III) Chloride (SbCl3) as the best material to be doped with ZnO. SbCl3 doped ZnO thin films have been successfully synthesized using the sol-gel spin coating method and the mixing process using the reflux technique. The materials used are zinc acetate dehydrate {Zn(CH3COO)2 2H2O}, Antimony (III) Chloride as doping dissolved by isopropanol solvent with variations in doping concentration of 4%; 5% and 6% were then stabilized with diethanolamine (DEA). The ZnO:SbCl3 thin film was made on a glass substrate using the spin coating method. The results of the characterization of the ZnO:SbCl3 thin film by XRD showed that the crystal sizes were 26 nm, 26 nm, and 24 nm, respectively. And the results of SEM characterization showed that the surface morphology of the ZnO:SbCl3 thin film had cracks during coating and black circles at a concentration of 5%. The result of UV-VIS characterization gives the transmittance value with all the light doped on the ZnO doped SbCl3 layer more than the absorption in the 350-800 nm range. And the absorbance value decreased sharply in the range of 350-800 nm. The value of the energy band gap increases at a concentration of 5% and decreases at a concentration of 6% with a value of eg 3.03 eV.