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Kumar, Sunil and Mo, Li and Motlan and Tansley, T.L. (1996) ELEMENTAL COMPOSITION OF REACTIVELY SPUTTERED INDIUM NITRIDE THIN FILMS. Japanese Journal of Applied Physics, 35 (4A). ISSN 1347-4065
Kumar, Sunil and Mo, Li and Motlan and Tansley, T.L. (1996) ELEMENTAL COMPOSITION OF REACTIVELY SPUTTERED INDIUM NITRIDE THIN FILMS. Japanese Journal of Applied Physics, 35 (4A). ISSN 1347-4065